Dr. Viorel Balan，Viorel Balan received his Engineering degree in Materials Science from Polytechnic Institute of Bucharest, Romania. He did his PhD work on chalcogenide glasses thin films at the University of Montpellier and received its degree in 2003. In 2005 he joined CEA LETI as CMP RD Engineer and published several papers on polymers, chalcogenides or tungsten CMP. Currently his work focus on CMP process for 3D applications. He is Head of CMP Process Engineering in LETI from 2015.
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